All-solid-state ultraviolet lasers have been broadly used in the fields of mechanical flaw detection, lithography, micromachining and medicine for the benefits of smaller quantity, prolonged lifestyle, superior effectiveness, excellent beam high-quality, extensive tuning and narrow spectral line, and so on. Employing significant energy near-infrared coherent gentle source as the basic frequency resource based upon nonlinear tuning engineering, making ultraviolet coherent radiation by multistage frequency conversion is regarded as a very important method to develop the ultraviolet coherent light-weight supply.
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全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。
Alternatively, the beam excellent of the greater ability DUV laser would become worse as a consequence of extra serious thermal and nonlinear consequences. Hence, the frequency conversion procedures must be very carefully created to mitigate the aforementioned effects. Thus, a superior-electrical power DUV laser with the FHG of one μm with a superb beam good quality may very well be obtained and can be valuable for acquiring the shorter wavelength DUV lasers which include 193 nm by SFG.
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Inside the scientific and industrial programs, the beam high quality on the DUV laser can also be a very important parameter. Significantly, the beam good quality of your DUV laser dramatically affects the laser machining results. The beam high quality with the DUV laser is set by that of the basic laser and also the crystal for your frequency conversion. Lately, a higher-energy DUV laser (>ten W) at 258 nm was documented having a beam top quality of M2 < 1.five, which was generated by FHG of the Yb:YAG laser at 1030 nm using the CLBO crystal [thirteen]. This laser would result in an improved laser machining result as compared to the preceding DUV lasers with larger sized M2.
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Moreover, combining the reliable-state laser with other nonlinear method which include stimulated Raman scattering, NIR lasers could possibly be attained at new wavelengths with higher electrical power and higher beam quality, which was examined through the evidence-of-basic principle experiment. This Raman laser scheme offers a fresh route to the substantial-ability DUV laser, Particularly for the wavelength of 193 nm.
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The conversion efficiency here from fundamental NIR to DUV is from five% to 36% in accordance with the reported results in Table 1. Raising the conversion efficiency will reduce the load on the look and setup of the basic laser amplifier together with the electric powered ability use. A fantastic beam quality of the fundamental laser can even contribute on the raising in the conversion efficiency in addition to the right electrical power intensity on the NIR and environmentally friendly laser from the SHG and FHG approach, respectively. The highest conversion efficiencies from NIR to green and eco-friendly to DUV laser by utilization of CLBO crystal are 70% and around 50%, respectively [12], which corresponds towards the conversion effectiveness of 35% from basic to DUV.
The development of your 193-nm laser was demonstrated by levels of SFG. In an effort to scale the DUV laser electrical power successfully, a whole new principle from the 193-nm DUV laser technology is presented based on the diamond Raman laser.